BS-ISO-14706 › Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

BS-ISO-14706 - 2014 EDITION - CURRENT
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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Keywords

Fluorimetry;Chemical analysis and testing;Density;Epitaxial layers;Surfactants;Contamination;Surfaces;X-ray analysis;Reflection;X-ray fluorescence spectrometry;Surface properties;Silicon;Contaminants;Surface chemistry;Substrates (insulating);Atoms

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

BS ISO 14706:2014

Revision Level

2014 EDITION

Status

Current

Publication Date

July 31, 2014

Replaces

BS ISO 14706:2000

Page Count

36

ISBN

9780580827259

International Equivalent

ISO 14706:2014

Committee Number

CII/60