BS-ISO-16531 Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

BS-ISO-16531 - 2020 EDITION - CURRENT
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Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Keywords

Surfaces;Surface chemistry;Optical measurement;Chemical composition;Glow discharges;Quantitative analysis;Spectroscopy;Chemical analysis and testing;Thickness;Mass

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

BS ISO 16531:2020

Revision Level

2020 EDITION

Status

Current

Publication Date

Oct. 6, 2020

Replaces

BS ISO 16531:2013

Page Count

28

ISBN

9780539057850

International Equivalent

ISO 16531

Committee Number

CII/60