BS-ISO-17331 › Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
BS-ISO-17331
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2004 EDITION
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CURRENT
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Included in this current edition are the following subparts:
2004 EDITION - March 31, 2005
2004 EDITION AMENDMENT 1 - Sept. 1, 2010
2004 EDITION AMENDMENT 1 - Sept. 1, 2010
Keywords
Chemical analysis and testing;Surface chemistry;Silicon;Iron;X-ray fluorescence spectrometry;Control samples;Decomposition reactions;Fluorimetry;Spectrophotometry;Substrates (insulating);Nickel;Spectroscopy
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 17331:2004+A1:2010
Revision Level
2004 EDITION
Status
Current
Publication Date
Sept. 30, 2010
Page Count
28
ISBN
9780580644795
International Equivalent
ISO 17331:2004/AMD 1:2010
Committee Number
CII/60