BS-ISO-21859 › Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

BS-ISO-21859 - 2019 EDITION - CURRENT


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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

Keywords

Semiconductor manufacture;Components;Plasma;Test methods;Ceramics;Special ceramics

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81.060.30 (Advanced ceramics)

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Document Number

BS ISO 21859:2019

Revision Level

2019 EDITION

Status

Current

Publication Date

June 19, 2019

Page Count

12

ISBN

9780580962011

International Equivalent

ISO 21859

Committee Number

RPI/13