BS-ISO-22278 › Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

BS-ISO-22278 - 2020 EDITION - CURRENT


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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Keywords

Ceramics;Special ceramics;Test methods;Crystalline state;Quality;Thin films

To find similar documents by classification:

81.060.30 (Advanced ceramics)

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Document Number

BS ISO 22278:2020

Revision Level

2020 EDITION

Status

Current

Publication Date

Aug. 26, 2020

Page Count

38

ISBN

9780580985898

International Equivalent

ISO 22278

Committee Number

RPI/13