DD-ISO/TR-15969 › Surface chemical analysis. Depth profiling. Measurement of sputtered depth
DD-ISO/TR-15969
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2001 EDITION
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CURRENT
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Surface chemical analysis. Depth profiling. Measurement of sputtered depth
Keywords
Chemical analysis and testing;Electron emission;Spectroscopy;Spectrochemical analysis;Surface properties;Depth;Dimensional measurement;Surface chemistry;Radiation measurement;X-rays;Profile measurement;Mass spectrometry;Control samples
To find similar documents by classification:
17.040.20 (Properties of surfaces)
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
DD ISO/TR 15969:2001
Revision Level
2001 EDITION
Status
Current
Publication Date
Oct. 1, 2001
Replaced By
PD ISO/TR 15969:2021
Page Count
22
ISBN
0580385019
International Equivalent
ISO/TR 15969:2001
Committee Number
CII/60