EN-62047-12 › Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

EN-62047-12 - 2011 EDITION - CURRENT -- See the following: BS-EN-62047-12 DIN-EN-62047-12



Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures


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Document Number

EN 62047-12:2011

Revision Level

2011 EDITION

Status

Current

Publication Date

Oct. 21, 2011