EN-62047-16 › Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films GÇô Wafer curvature and cantilever beam deflection methods

EN-62047-16 - 2015 EDITION - CURRENT -- See the following: BS-EN-62047-16 DIN-EN-62047-16



Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films GÇô Wafer curvature and cantilever beam deflection methods


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Document Number

EN 62047-16:2015

Revision Level

2015 EDITION

Status

Current

Publication Date

July 10, 2015