EN-62374 › Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films

EN-62374 - 2007 EDITION - CURRENT -- See the following: BS-EN-62374



Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films


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31.080.01 (Semiconductor devices in general)

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Document Number

EN-62374

Revision Level

2007 EDITION

Status

Current

Publication Date

Jan. 1, 2007