IEC-60050-523 › International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices

IEC-60050-523 - EDITION 1.0 - CURRENT


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IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
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Document Number

IEC 60050-523 Ed. 1.0 b:2018

Revision Level

EDITION 1.0

Status

Current

Publication Date

Dec. 1, 2018

Committee Number

1