IEC-62047-1 › Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

IEC-62047-1 - EDITION 2.0 - CURRENT
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IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
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Document Number

IEC 62047-1 Ed. 2.0 b:2016

Revision Level

EDITION 2.0

Status

Current

Publication Date

Jan. 1, 2016

Committee Number

47F