IEC-62047-18 Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials

IEC-62047-18 - EDITION 1.0 - CURRENT


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IEC 62047-18:2013 specifies the method for bend testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 micrometre and 10 micrometre. This International Standard specifies the bend testing and test piece shape for micro-sized smooth cantilever type test pieces, which enables a guarantee of accuracy corresponding to the special features.
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Document Number

IEC 62047-18 Ed. 1.0 b:2013

Revision Level

EDITION 1.0

Status

Current

Publication Date

July 1, 2013

Committee Number

47F