IEC-62047-21 › Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC-62047-21
-
EDITION 1.0
-
CURRENT
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IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
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Document Number
IEC 62047-21 Ed. 1.0 b:2014
Revision Level
EDITION 1.0
Status
Current
Publication Date
June 19, 2014
Committee Number
47F