IEC-62607-9-1 › Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

IEC-62607-9-1 - EDITION 1.0 - CURRENT


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IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.
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Document Number

IEC/TS 62607-9-1 Ed. 1.0 en:2021

Revision Level

EDITION 1.0

Status

Current

Publication Date

Oct. 1, 2021

Committee Number

113