IEC-62622 Artificial gratings used in nanotechnology - Description and measurement of dimensional quality parameters

IEC-62622 - EDITION 1.0 - CURRENT


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IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.
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07.030 (Physics. Chemistry This group includes standards in the field of physics and chemistry as natural sciences Applied physics, see 17 Chemical technology, see 71)

07.120 (Nanotechnologies)

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Document Number

IEC/TS 62622:2012

Revision Level

EDITION 1.0

Status

Current

Publication Date

Oct. 2, 2012

Committee Number

113