IEC-63258 › Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

IEC-63258 - EDITION 1.0 - CURRENT


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IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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Document Number

IEC/TR 63258 Ed. 1.0 en:2021

Revision Level

EDITION 1.0

Status

Current

Publication Date

March 1, 2021

Committee Number

113