ISO-13083 Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

ISO-13083 - 1ST EDITION - CURRENT


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ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

ISO 13083:2015

Revision Level

1ST EDITION

Status

Current

Publication Date

Aug. 15, 2015

Committee Number

ISO/TC 201/SC 9