ISO-13084 Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

ISO-13084 - 2ND EDITION - CURRENT
Show Complete Document History

Document Center Inc. is an authorized dealer of ISO standards.
The following bibliographic material is provided to assist you with your purchasing decision:


This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

ORDER

Price:

$120.28        


Want this as a site license?

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.

Document Number

ISO 13084:2018

Revision Level

2ND EDITION

Status

Current

Publication Date

Nov. 1, 2018

Committee Number

ISO/TC 201/SC 6