ISO-14999-3 › Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 3: Calibration and validation of interferometric test equipment and measurements
ISO-14999-3
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1ST EDITION
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CURRENT
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ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.
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Document Number
ISO/TR 14999-3:2005
Revision Level
1ST EDITION
Status
Current
Publication Date
March 1, 2005
Committee Number
ISO/TC 172/SC 1