ISO-16700 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

ISO-16700 - 2ND EDITION - CURRENT
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ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

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37.020 (Optical equipment Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems Ophthalmic equipment, see 11.040.70 Optical measuring instruments, see 17.180.30 Photographic equipment lenses, see 37.040.10)

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Document Number

ISO 16700:2016

Revision Level

2ND EDITION

Status

Current

Publication Date

Aug. 1, 2016

Committee Number

ISO/TC 202/SC 4