ISO-16700 › Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
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ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
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Document Number
ISO 16700:2016
Revision Level
2ND EDITION
Status
Current
Publication Date
Aug. 1, 2016
Committee Number
ISO/TC 202/SC 4