ISO-17973 Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

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ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.




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Document Number

ISO 17973:2016

Revision Level




Publication Date

Sept. 1, 2016

Committee Number

ISO/TC 201/SC 7