ISO-18114 › Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

ISO-18114 - 2ND EDITION - CURRENT
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This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

ISO 18114:2021

Revision Level

2ND EDITION

Status

Current

Publication Date

May 1, 2021

Committee Number

ISO/TC 201/SC 6