ISO-18118 › Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.
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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO 18118:2024
Revision Level
3RD EDITION
Status
Current
Publication Date
Feb. 1, 2024
Committee Number
ISO/TC 201/SC 7