ISO-19319 › Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

ISO-19319 - 2ND EDITION - CURRENT
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ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

ISO/TR 19319:2013

Revision Level

2ND EDITION

Status

Current

Publication Date

March 15, 2013

Committee Number

ISO/TC 201/SC 2