ISO-19606 › Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy
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This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 m to 2,5 m.
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Document Number
ISO 19606:2024
Revision Level
2ND EDITION
Status
Current
Publication Date
Nov. 1, 2024
Committee Number
ISO/TC 206