ISO-20341 › Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials

ISO-20341 - 1ST EDITION - CURRENT


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ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

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Document Number

ISO 20341:2003

Revision Level

1ST EDITION

Status

Current

Publication Date

July 15, 2003

Committee Number

ISO/TC 201/SC 6