ISO-21383 › Microbeam analysis - Scanning electron microscopy - Qualification of the scanning electron microscope for quantitative measurements

ISO-21383 - 1ST EDITION - CURRENT


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This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

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37.020 (Optical equipment Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems Ophthalmic equipment, see 11.040.70 Optical measuring instruments, see 17.180.30 Photographic equipment lenses, see 37.040.10)

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Document Number

ISO/TS 21383:2021

Revision Level

1ST EDITION

Status

Current

Publication Date

March 1, 2021

Committee Number

ISO/TC 202/SC 4