ISO-22493 › Microbeam analysis - Scanning electron microscopy - Vocabulary
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ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.
ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
To find similar documents by classification:
37.020 (Optical equipment Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems Ophthalmic equipment, see 11.040.70 Optical measuring instruments, see 17.180.30 Photographic equipment lenses, see 37.040.10)
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April 15, 2014
ISO/TC 202/SC 1