ISO-23131 › Ellipsometry - Principles

ISO-23131 - 1ST EDITION - CURRENT


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This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

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17.020 (Metrology and measurement in general Including measuring instruments in general, preferred numbers, standard measures, general aspects of reference materials, etc. Quantities and units, see 01.060 Chemical reference materials, see 71.040.30)

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Document Number

ISO 23131:2021

Revision Level

1ST EDITION

Status

Current

Publication Date

April 1, 2021

Committee Number

ISO/TC 107