ISO-23216 Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

ISO-23216 - 1ST EDITION - CURRENT


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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

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Document Number

ISO 23216:2021

Revision Level

1ST EDITION

Status

Current

Publication Date

May 1, 2021

Committee Number

ISO/TC 107