ISO-23216 › Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
To find similar documents by classification:
25.220.99 (Other treatments and coatings)
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Document Number
ISO 23216:2021
Revision Level
1ST EDITION
Status
Current
Publication Date
May 1, 2021
Committee Number
ISO/TC 107