ISO-25138 Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry

ISO-25138 - 2ND EDITION - CURRENT
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This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

ISO/TS 25138:2019

Revision Level

2ND EDITION

Status

Current

Publication Date

Aug. 1, 2019

Committee Number

ISO/TC 201/SC 8