ISO-25138 › Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry
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This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO/TS 25138:2019
Revision Level
2ND EDITION
Status
Current
Publication Date
Aug. 1, 2019
Committee Number
ISO/TC 201/SC 8