ISO-3530 Vacuum technology -- Mass-spectrometer-type leak-detector calibration

ISO-3530 - 1ST EDITION - CURRENT


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Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

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Document Number

ISO 3530:1979

Revision Level

1ST EDITION

Status

Current

Publication Date

Sept. 1, 1979

Committee Number

ISO TC 112/SC 2