ISO-3530 › Vacuum technology -- Mass-spectrometer-type leak-detector calibration
ISO-3530
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1ST EDITION
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CURRENT
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Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
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23.160 (Vacuum technology Including vacuum pumps)
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Document Number
ISO 3530:1979
Revision Level
1ST EDITION
Status
Current
Publication Date
Sept. 1, 1979
Committee Number
ISO TC 112/SC 2