PAS-135 › Terminology for nanofabrication
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Terminology for nanofabrication
Keywords
Nanotechnology, Nanomaterials, Vocabulary, Terminology, Production, Chemical technology processes, Etching, Photolithography, Coating processes
To find similar documents by classification:
01.040.71 (Chemical technology (Vocabularies))
71.100.99 (Other products of the chemical industry)
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Document Number
PAS 135:2007
Revision Level
2007 EDITION
Status
Cancelled
Publication Date
Dec. 31, 2007
Page Count
24
ISBN
9780580613203