PD-ISO-15969 › Surface chemical analysis. Depth profiling. Measurement of sputtered depth
PD-ISO-15969
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2021 EDITION
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CURRENT
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Surface chemical analysis. Depth profiling. Measurement of sputtered depth
Keywords
Chemical analysis and testing;Electron emission;Spectroscopy;Spectrochemical analysis;Surface properties;Depth;Dimensional measurement;Surface chemistry;Radiation measurement;X-rays;Profile measurement;Mass spectrometry;Control samples
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
PD ISO/TR 15969:2021
Revision Level
2021 EDITION
Status
Current
Publication Date
March 26, 2021
Replaces
DD ISO/TR 15969:2001
Page Count
22
ISBN
9780539154320
International Equivalent
ISO/TR 15969
Committee Number
CII/60