SEMI-E47.1 Historical Revision Information
Provisional Mechanical Specification for Boxes and Pods Used To Transport and Store 300-mm

SEMI-E47.1 - 6/97 EDITION - SUPERSEDED
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Provisional Mechanical Specification for Boxes & Pods Used To Transport & Store 300-mm


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Document Number

SEMI-E47.1

Revision Level

6/97 EDITION

Status

Superseded

Publication Date

June 1, 1997

Page Count

19 pages