SIS-ISO/TS-25138 › Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry (ISO/TS 25138:2010, IDT)
SIS-ISO/TS-25138
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2011 EDITION
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CURRENT
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2011 EDITION - Jan. 3, 2011
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This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Designation Name
SIS-ISO/TS 25138:2011
Revision Level
2011 EDITION
Status
Current
Publication Date
Jan. 3, 2011
Language(s)
English
Page Count
48