SS-EN-ISO-10692-1 › Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections (ISO 10692-1:2001)
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This part of ISO 10692 applies to the outlet connections of gas cylinder valves for gases and gas mixtures and concerns special requirements where the highest levels of cleanliness and freedom from particles are demanded for the manufacture of microelectronic components or similar applications.
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SS-EN ISO 10692-1
Sept. 7, 2001
ISO 10692-1:2001 IDT* EN ISO 10692-1:2001 IDT