SS-EN-ISO-14644-6 › Cleanrooms and associated controlled environment - Part 6: Vocabulary (ISO 14644-6:2007)
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This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.
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SS-EN ISO 14644-6:2007
July 26, 2007
EN ISO 14644-6:2007(IDT); ISO 14644-6:2007(IDT)