SS-EN-ISO-23216 Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

SS-EN-ISO-23216 - 2022 EDITION - CURRENT


Document Center Inc. is an authorized dealer of SIS standards.
The following bibliographic material is provided to assist you with your purchasing decision:


This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

To find similar documents by classification:

25.220.99 (Other treatments and coatings)

This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.

ORDER

Price:

$100.05        


Want this as a site license?



Designation Name

SS-EN ISO 23216:2022

Revision Level

2022 EDITION

Status

Current

Publication Date

Nov. 18, 2022

Language(s)

English

Page Count

20

International Equivalent

EN ISO 23216:2022(IDT); ISO 23216:2021(IDT)