SS-EN-ISO-23216 › Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)
SS-EN-ISO-23216
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2022 EDITION
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CURRENT
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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
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25.220.99 (Other treatments and coatings)
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Designation Name
SS-EN ISO 23216:2022
Revision Level
2022 EDITION
Status
Current
Publication Date
Nov. 18, 2022
Language(s)
English
Page Count
20
International Equivalent
EN ISO 23216:2022(IDT); ISO 23216:2021(IDT)