SS-EN-ISO-25178-603 Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

SS-EN-ISO-25178-603 - 2013 EDITION - CURRENT


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This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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17.040.20 (Properties of surfaces)

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Designation Name

SS-EN ISO 25178-603:2013

Revision Level

2013 EDITION

Status

Current

Publication Date

Oct. 3, 2013

Language(s)

English

Page Count

44

International Equivalent

EN ISO 25178-603:2013(IDT); ISO 25178-603:2013(IDT)