SS-EN-ISO-25178-603 › Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
SS-EN-ISO-25178-603
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2013 EDITION
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CURRENT
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This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
To find similar documents by classification:
17.040.20 (Properties of surfaces)
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Designation Name
SS-EN ISO 25178-603:2013
Revision Level
2013 EDITION
Status
Current
Publication Date
Oct. 3, 2013
Language(s)
English
Page Count
44
International Equivalent
EN ISO 25178-603:2013(IDT); ISO 25178-603:2013(IDT)