VDI/VDE-2655 BLATT 1.1 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement

VDI/VDE-2655 BLATT 1.1 - 2008 EDITION - CURRENT



Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement


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Document Number

VDI/VDE 2655 Blatt 1.1:2008-03

Revision Level

2008 EDITION

Status

Current

Publication Date

March 1, 2008