VDI/VDE-2655 BLATT 1.3 Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

VDI/VDE-2655 BLATT 1.3 - 2020 EDITION - CURRENT



Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement


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Document Number

VDI/VDE 2655 Blatt 1.3

Revision Level

2020 EDITION

Status

Current

Publication Date

Feb. 1, 2020