ASTM-F522 › Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)

ASTM-F522 - 1994 EDITION - SUPERSEDED -- See the following: ASTM-F1810
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Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
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ICS Number Code 29.045 (Semiconducting materials)

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Document Number

ASTM-F522-94

Revision Level

1994 EDITION

Status

Superseded

Modification Type

Replaced

Publication Date

July 15, 1994

Document Type

Test Method

Page Count

4 pages