ISO-24639 › Microbeam analysis - Analytical electron microscopy - Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy

ISO-24639 - 1ST EDITION - CURRENT


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This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.

This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.

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Document Number

ISO 24639:2022

Revision Level

1ST EDITION

Status

Current

Publication Date

July 1, 2022

Committee Number

ISO/TC 202/SC 3