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ASTM-F1529
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Complete Document History
Standard Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure
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Obsolete Revision Information:
2002 EDITION - WITHDRAWN IN 2003 - Dec. 10, 2002
1996 EDITION - SHEET RESISTANCE UNIFORMITY EV - Dec. 10, 1996
1994 EDITION - SHEET RESISTANCE UNIFORMITY EV - July 15, 1994