ASTM-F1619 › Complete Document History
Standard Test Method for Measurement of Interstitial Oxygen Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle (Withdrawn 2003)


Obsolete Revision Information:
   1995 R00(E1) EDITION - EDITORIAL CHANGES WERE MADE - April 1, 2002
   1995 EDITION - SPECTROSCOPY WITH P-POLARIZED - Sept. 15, 1995
   1995 R00 EDITION - REAPPROVED IN 2000 - Sept. 15, 1995