ASTM-F25 Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

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Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas



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1.1 This test method covers counting and sizing airborne particulate matter 5 [mu]m and larger. The sampling areas are specifically those with contamination levels typical of clean rooms (white and gray rooms) and dust-controlled areas designed for electronic work. It is not a test method for dust counting where isokinetic sampling is a factor (Appendix X1).

1.2 The values stated in inch-pound units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Note 1-Information is included relative to modifications to the referee techniques which will make the test method more suitable for specific routine monitoring, such as described in Appendix X4.


Dust-controlled areas-for processing electronic devices; Electron tubes-dust-controlled areas for assembling; Microscopic examination-electronic materials; Particulate contamination-airborne; Semiconductor clean rooms; sizing and counting airborne particulate contamination in clean; rooms/other dust-controlled areas designed for electronic/similar; applications, test; ICS Number Code 13.040.30 (Workplace atmospheres)

To find similar documents by ASTM Volume:

15.03 (Space Simulation; Aerospace and Aircraft; Composite Materials)

To find similar documents by classification:

13.040.30 (Workplace atmospheres Air quality of surgery rooms, see 11.080.01)

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Publication Date

April 27, 2021

Document Type

Test Method

Page Count

8 pages

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