ASTM-F523 › Complete Document History
Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces (Withdrawn 2003)


Obsolete Revision Information:
   2002 EDITION - WITHDRAWN IN 2003 - Dec. 10, 2002
   1993 R97 EDITION - REAPPROVED IN 1997 - Sept. 15, 1993
   1993 EDITION - Unaided Visual Inspection of Polished Silicon Wafer Surfaces - Sept. 15, 1993
   1988 EDITION - Unaided Visual Inspection of Polished Silicon Wafer Surfaces - Oct. 31, 1988