ASTM-F533 › Complete Document History
Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003)


Obsolete Revision Information:
   WITHDRAWN - NO REPLACEMENT, HANDED TO SEMI - May 1, 2003
   2002A EDITION - Thickness and Thickness Variation of Silicon Wafers - Dec. 10, 2002
   2002 EDITION - Thickness and Thickness Variation of Silicon Wafers - Jan. 10, 2002
   1996 EDITION - Thickness and Thickness Variation of Silicon Wafers - June 10, 1996
   1990 EDITION - Thickness and Thickness Variation of Silicon Wafers - Sept. 28, 1990
   1988 EDITION - Thickness and Thickness Variation of Silicon Wafers - Oct. 31, 1988