ASTM-F576 › Complete Document History
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)


Obsolete Revision Information:
   2001 EDITION - Measurement of Insulator Thickness and Refractive Index on S - June 10, 2001
   2000 EDITION - Measurement of Insulator Thickness and Refractive Index on S - Dec. 10, 2000
   1995 EDITION - Measurement of Insulator Thickness and Refractive Index on S - Nov. 10, 1995
   1990 EDITION - Measurement of Insulator Thickness and Refractive Index on S - Sept. 28, 1990
   1984A R90(E1) EDITION - EDITORIALLY CORRECTED - April 1, 1990
   1984A EDITION - Measurement of Insulator Thickness and Refractive Index on S - May 25, 1984